Microtronic inspection systems enable sophisticated inspection (micro/macro) for wafers ranging in size from 50mm to 300mm. These systems combine the LEP robotics wafer handlers with the Zeiss Axiotron 2 microscope, creating state-of-the-art inspection systems that are both easy to operate and powerful enough for the most seasoned microscopist.
The heart of the system is the SITEview™ software. It uses single screen operations to minimize screen clutter, incorporates multi-level password protection and the ability to custom design the user screen appearance, control features and functions. SITEview™ uses one software version independent of system configuration. This single package controls the robot, motorized or manual stage, aligner, tilt and wobble macro, backside macro, tilt-back cassette towers, integrated cassette wafer aligners, fixed or handheld bar code reader, OCR, cameras, imaging systems, pattern recognition and inspection microscopes. All systems are available in SMIF enclosures with singular or multiple in-line indexers.
|
300 FA |
 |
|
microINSPECT |
 |
|
EAGLEview™ |
 |
