The MicroSORT system was designed with the goal of maximizing throughput with the least amount of wafer handling. This stand-alone sorter enables sophisticated sort routines on up to four wafer cassette platforms. OCR scribes may be read from the top, bottom or simultaneously, allowing for enhanced wafer tracking and sorting. The user has the ability to move, compress, randomize, find, align, verify, and split wafer lots. A virtual tweezer mode allows an operator to click on wafer icons to move wafers between cassettes, read wafers and swap wafer positions.
Automatic tilt-back cassette towers provide ergonomic loading of cassettes. An integrated flat or notch finder built into the tilt-back mechanism allows all of the wafers in the cassette to be oriented before they are raised. This greatly improves OCR throughput and eliminates the need to separately align each wafer.
A complete macro script language allows the implementation of complex, multiple-move sorter routines in a single recipe. This scripting language also provides messages to be displayed on the screen, execution of customer-developed programs and calls to the internal SITEview™ command set.
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microSORT |
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EAGLEview™ |
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