Microtronic Wafer Inspection Solutions are able to Address the Most Demanding Requirements of Semiconductor Manufacturers, IDMs, and Foundries
Microtronic provides a wide variety of high performance semiconductor wafer defect inspection, sorting, and metrology equipment, along with solutions and services that increase yields, improve production quality, and lower costs. Below is a summary of some of our general offerings. (Click Applications title for details.)
Applications
Microtronic Wafer Inspection Solutions are able to Address the Most Demanding Requirements of Semiconductor Manufacturers, IDMs, and Foundries
Microtronic provides a wide variety of high performance semiconductor wafer defect inspection, sorting, and metrology equipment, along with solutions and services that increase yields, improve production quality, and lower costs. Below is a summary of some of our general offerings. (Click Applications title for details.)
Our Applications Include:
Wafer Randomization Modes
Randomization and tracking occurs simultaneously during the EAGLEview macro inspection with no impact on throughput. Users can implement...
Customized Inspection Recipes
EAGLEview does not require recipes. However, there may be certain levels (i.e., metal layers, CMP, etc.) that users...
Customized Automatic Sorting
EAGLEview offers a full range of sorting options. During an inspection, EAGLEview performs OCR to read wafer scribes. ...
Skipping Manual Inspection
The EAGLEview platform can be an integral part of the Photo ADI inspection strategy. Depending on typical failure...
Guardbanding Capability
Traditionally, guardbanding has been used primarily at end-of-line testing. But it can also play a critical role during...
Excursion Control
The EAGLEview automated macro inspection platform provides unprecedented excursion control within the fab. EAGLEview inspections are fast enough...
ProcessGuard Defect Library
ProcessGuard software contains an integrated defect library which provides a repository of defect images and text descriptions. Microtronic...
Transparent Wafer Imaging
EAGLEview inspects wafers without the need for device dependent recipes. These wafers can be any size (75mm-300mm) and...
ProcessGuard Xtensis (and Trans-Imager Modules)
Microtronic introduced an innovative new way to automatically detect and manage wafer processing defects from inside specific types...
Artificial Intelligence (AI) on CMP Edge Residual and Pin Hole Defects
Most automated inspection tools utilize a die-to-die inspection strategy. EAGLEview inspects the entire wafer surface, including partial die...
MicroView (Internal & External Microscope Options)
MicroView Camera Capture MicroView allows microscope and other images to be captured and stored in the EAGLEview database...
Download Microtronic Macro Defect Brochure
Microtronic Overview Video
Gallery of Macro Defects Detected By EAGLEview
Reticle Tilt Defect
Spin Defect – Line
Spin Defect – Entire Wafer
Spin Defect on Edge
Center Spin Macro Defect
Scratches By Machine
Scratches By Human
Rework – Yield Improvement
Rework – Scrap Avoidance
Previous Layer Defects
Partial Pattern – No Expose
Poly Haze Macro Defect
Particle Defects
Missing Patterns
Lens Stepper Macro Defects
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