Randomization and tracking occurs simultaneously during the EAGLEview macro inspection with no impact on throughput. Users can implement a variety of randomization modes including full randomization, maintain slot integrity and our latest offering “metrology sampling” which allows users to specify which slots NOT to randomize.
Wafer Randomization Modes
Randomization and tracking occurs simultaneously during the EAGLEview macro inspection with no impact on throughput. Users can implement a variety of randomization modes including full randomization, maintain slot integrity and our latest offering “metrology sampling” which allows users to specify which slots NOT to randomize.
Download Microtronic Macro Defect Brochure
Microtronic Overview Video
Gallery of Macro Defects Detected By EAGLEview
Reticle Tilt Defect
Spin Defect – Line
Spin Defect – Entire Wafer
Spin Defect on Edge
Center Spin Macro Defect
Scratches By Machine
Scratches By Human
Rework – Yield Improvement
Rework – Scrap Avoidance
Previous Layer Defects
Partial Pattern – No Expose
Poly Haze Macro Defect
Particle Defects
Missing Patterns
Lens Stepper Macro Defects
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