ProcessGuard software contains an integrated defect library which provides a repository of defect images and text descriptions. Microtronic Applications can update or provide instructions for users to update the defect library. Engineers use this as a training aide which improves classification accuracy, and as a decision tree for lot disposition.
ProcessGuard Defect Library
ProcessGuard software contains an integrated defect library which provides a repository of defect images and text descriptions. Microtronic Applications can update or provide instructions for users to update the defect library. Engineers use this as a training aide which improves classification accuracy, and as a decision tree for lot disposition.
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Gallery of Macro Defects Detected By EAGLEview
Reticle Tilt Defect
Spin Defect – Line
Spin Defect – Entire Wafer
Spin Defect on Edge
Center Spin Macro Defect
Scratches By Machine
Scratches By Human
Rework – Yield Improvement
Rework – Scrap Avoidance
Previous Layer Defects
Partial Pattern – No Expose
Poly Haze Macro Defect
Particle Defects
Missing Patterns
Lens Stepper Macro Defects
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