The EAGLEview platform can be an integral part of the Photo ADI inspection strategy. Depending on typical failure mechanisms and the leading causes for rework, EAGLEview macro inspection combined with a “micro” inspection (microscope or metrology tool) can significantly impact the staffing needed for manual microscope inspection. Implementing EAGLEview macro inspection can result in higher productivity, improved yield/quality, less sampling and reduced inspection staffing. For additional information on the methodology used for skipping manual inspection, see Technical Bulletin #6.
Skipping Manual Inspection
The EAGLEview platform can be an integral part of the Photo ADI inspection strategy. Depending on typical failure mechanisms and the leading causes for rework, EAGLEview macro inspection combined with a “micro” inspection (microscope or metrology tool) can significantly impact the staffing needed for manual microscope inspection. Implementing EAGLEview macro inspection can result in higher productivity, improved yield/quality, less sampling and reduced inspection staffing. For additional information on the methodology used for skipping manual inspection, see Technical Bulletin #6.
Download Microtronic Macro Defect Brochure
Microtronic Overview Video
Gallery of Macro Defects Detected By EAGLEview
Reticle Tilt Defect
Spin Defect – Line
Spin Defect – Entire Wafer
Spin Defect on Edge
Center Spin Macro Defect
Scratches By Machine
Scratches By Human
Rework – Yield Improvement
Rework – Scrap Avoidance
Previous Layer Defects
Partial Pattern – No Expose
Poly Haze Macro Defect
Particle Defects
Missing Patterns
Lens Stepper Macro Defects
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