EAGLEview inspects wafers without the need for device dependent recipes. These wafers can be any size (75mm-300mm) and almost any material (opaque or transparent). Challenges were overcome in terms of mapping cassettes, aligning wafers, OCR read, and imaging wafers.
Transparent Wafer Imaging
EAGLEview inspects wafers without the need for device dependent recipes. These wafers can be any size (75mm-300mm) and almost any material (opaque or transparent). Challenges were overcome in terms of mapping cassettes, aligning wafers, OCR read, and imaging wafers.
Download Microtronic Macro Defect Brochure
Microtronic Overview Video
Gallery of Macro Defects Detected By EAGLEview
Reticle Tilt Defect
Spin Defect – Line
Spin Defect – Entire Wafer
Spin Defect on Edge
Center Spin Macro Defect
Scratches By Machine
Scratches By Human
Rework – Yield Improvement
Rework – Scrap Avoidance
Previous Layer Defects
Partial Pattern – No Expose
Poly Haze Macro Defect
Particle Defects
Missing Patterns
Lens Stepper Macro Defects
Navigation
Social connect