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3 Chamber Macro Defect
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Microtronic is a leader in Semiconductor Wafer Defect Inspection, Sorting and Metrology.
3 Chamber Macro Defect
3 Chamber Macro Defect
Example of a semiconductor wafer with a macro defect caused by a 3-chamber issue.
EAGLEview automatically and clearly indicates that every third incoming wafer is flagged which points toward there being a 3-Chamber issue or wafer defect.
Download Microtronic Macro Defect Brochure
Microtronic Overview Video
Gallery of Macro Defects Detected By EAGLEview
Reticle Tilt Defect
Spin Defect – Line
Spin Defect – Entire Wafer
Spin Defect on Edge
Center Spin Macro Defect
Scratches By Machine
Scratches By Human
Rework – Yield Improvement
Rework – Scrap Avoidance
Previous Layer Defects
Partial Pattern – No Expose
Poly Haze Macro Defect
Particle Defects
Missing Patterns
Lens Stepper Macro Defects
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