Flashfield Defects

Flash field defects are typically near the edge of the semiconductor wafer and due to a focus issue for a stepper shot or possibly a topography issue.

Some flash field macro defects may occur in the interior of the wafer – these macro defects are also referred to as a dropped or missing shot.

Additional example of a flash field defect on the semiconductor wafer.

Additional example of a flash field macro defect on the semiconductor wafer.