Missing pattern wafers can sometimes be seen in the thumbnail images that are generated in the EAGLEview software causing the semiconductor wafers to appear as a different color. Unpolished (CMP) semiconductor wafers also appear as missing pattern wafers.
Some missing pattern wafers are very easy to detect as can be seen above on the thumbnail images from EAGLEview on the right. Other missing patterns on semiconductor wafers are more difficult to detect because the color differences are more subtle. These differences depend on the level (dark vs. bright), the cause of the missing pattern (lack of coat, expose or develop) and the throughout rate on the reticle.
Missing Patterns
Missing Patterns
Missing pattern wafers can sometimes be seen in the thumbnail images that are generated in the EAGLEview software causing the semiconductor wafers to appear as a different color. Unpolished (CMP) semiconductor wafers also appear as missing pattern wafers.
Some missing pattern wafers are very easy to detect as can be seen above on the thumbnail images from EAGLEview on the right. Other missing patterns on semiconductor wafers are more difficult to detect because the color differences are more subtle. These differences depend on the level (dark vs. bright), the cause of the missing pattern (lack of coat, expose or develop) and the throughout rate on the reticle.
Download Microtronic Macro Defect Brochure
Microtronic Overview Video
Gallery of Macro Defects Detected By EAGLEview
Reticle Tilt Defect
Spin Defect – Line
Spin Defect – Entire Wafer
Spin Defect on Edge
Center Spin Macro Defect
Scratches By Machine
Scratches By Human
Rework – Yield Improvement
Rework – Scrap Avoidance
Previous Layer Defects
Partial Pattern – No Expose
Poly Haze Macro Defect
Particle Defects
Missing Patterns
Lens Stepper Macro Defects
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