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Wafer Hotspot Defects
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Microtronic is a leader in Semiconductor Wafer Defect Inspection, Sorting and Metrology.
Wafer Hotspot Defects
Wafer Hotspot Defects
A hotspot macro defect is a localized area that is out of focus and may be due to a particle on the backside of the wafer or a particle on the stepper chuck.
Image of a hotspot macro defect identified by an EAGLEview inspection.
Another representative example of a large hotspot identified and imaged during an EAGLEview automated defect inspection.
Download Microtronic Macro Defect Brochure
Microtronic Overview Video
Gallery of Macro Defects Detected By EAGLEview
Reticle Tilt Defect
Spin Defect – Line
Spin Defect – Entire Wafer
Spin Defect on Edge
Center Spin Macro Defect
Scratches By Machine
Scratches By Human
Rework – Yield Improvement
Rework – Scrap Avoidance
Previous Layer Defects
Partial Pattern – No Expose
Poly Haze Macro Defect
Particle Defects
Missing Patterns
Lens Stepper Macro Defects
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